JPH0469462U - - Google Patents

Info

Publication number
JPH0469462U
JPH0469462U JP11400190U JP11400190U JPH0469462U JP H0469462 U JPH0469462 U JP H0469462U JP 11400190 U JP11400190 U JP 11400190U JP 11400190 U JP11400190 U JP 11400190U JP H0469462 U JPH0469462 U JP H0469462U
Authority
JP
Japan
Prior art keywords
substrate
openable
glow discharge
target
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11400190U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11400190U priority Critical patent/JPH0469462U/ja
Publication of JPH0469462U publication Critical patent/JPH0469462U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11400190U 1990-10-29 1990-10-29 Pending JPH0469462U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11400190U JPH0469462U (en]) 1990-10-29 1990-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11400190U JPH0469462U (en]) 1990-10-29 1990-10-29

Publications (1)

Publication Number Publication Date
JPH0469462U true JPH0469462U (en]) 1992-06-19

Family

ID=31861641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11400190U Pending JPH0469462U (en]) 1990-10-29 1990-10-29

Country Status (1)

Country Link
JP (1) JPH0469462U (en])

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